Taiwanese scientists develop high-efficiency silicon LED heterostructure
Date:2010-11-24 16:04
he heterostructure, successfully produce high-efficiency silicon light-emitting diodes, non-direct band semiconductor in optoelectronic applications on the new opportunities opened up.
NTU team first by low pressure chemical vapor deposition (LPCVD) growth in the p-type silicon of silicon nano-ceramic plate, and then thermal oxidation (thermal oxidation) the ceramic layer embedded in silicon dioxide. Followed by atomic layer deposition technique (Atomic Layer Deposition, ALD) production of high
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